Target protection system
The Target Protection System (TPS) from Tosoh, Inc. is designed to protect the ultra-fine surface of advanced planar targets. It eliminates arcing and particulate emissions caused by abrasions, scratches, and contamination that can occur during contact with the target`s critical surfaces areas.
TPS meets standards required for targets with ultra-fine surface finishes–standards that existing packaging methods are not able to meet. The target is encased in a clear plastic shell, custom fitted to prevent critical surface area contact. It is secured at the base, then bagged and filled with argon to prevent surface oxide growth. TPS is cleanroom compatible.
Tosoh SMD, Inc.
Grove City, OH