Standards Committees Meet at SEMICON West

Standards Committees Meet at SEMICON West

By Lisa A. Coleman

San Francisco, CA–The SEMI International Standards divisions are meeting at the 25th annual SEMICON West conference and exhibition this month. The Contamination in Distribution Systems Subcommittee will discuss ballot results for four test methods relating to gas filters, distribution systems and gas panel systems. In addition, the Minienvironment Contamination Standards Validation Program will discuss results of implementing two new standards, SEMI E45 and E46, specifications for determining inorganic and organic contamination from minienvironments, respectively. The minienvironment committee will also address further applications for E45 and E46 including validation of cleaning procedures of minienvironments (pods, storage boxes, etc.), and monitoring the degradation of cleanliness minienvironment usage.

The standards committee will meet from July 10 – 13. SEMICON will be held July 11-13, at Moscone Convention Center in San Francisco. n


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