Analyzer detects ozone leaks in semiconductor equipment

IN USA, Inc. is introducing its Model L2-RM on-line ozone analyzer that measures and pinpoints ozone (O3) leaks inside a semiconductor manufacturing tool. The Model L2-RM uses sensors, microprocessor-based measurement and control circuitry, dual UV sensors combined in a package that mounts inside a semiconductor manufacturing tool. The tool provides real-time, tool-specific ozone leak detection that allows the user to pinpoint the exact location of a leak. The analyzer measures ozone concentration that is absolutely ozone- and tool-specific. The dual UV sensors compensate for background contaminants and for potentially interfering vapors such as PVC pipe cement, benzene, acetone, toluene, and other organic compounds that are sometimes present during tool startup.

IN USA, Inc., Needham, MA (617) 444-2929