Selete evaluates furnace

Selete evaluates furnace

Bilthoven, The Netherlands

Semiconductor Leading Edge Technologies Inc. (Selete; Yokohama, Japan) is evaluating the A412 Dual Reactor Vertical Furnace for 300-mm processing from ASM Europe B.V., the Dutch subsidiary of ASM International. The system uses a combination of an LPCVD silicon nitride and TEOS tube and an LPCVD in situ doped poly silicon tube and uses a pre-purged FOUP cassette and nitrogen-purges minienvironment configuration to provide 130-nm device technology processing. — KS

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