Vapor delivery system
The GS-437 for chemical vapor deposition, diffusion processes and etch operations supplies a precise flow of chemical vapor without the use of a carrier gas by controlling vapor pressure using a highly accurate mass flow controller. According to the manufacturer, the refill system is in the same cabinet as the vaporizer, which allows safe delivery of chemicals and uses less floor space than other vapor delivery systems. The cabinet and vaporizer are heated to prevent recondensation between the vaporizer tank and the process chamber, which reduces the risk of accidents.
Aera Corp., Austin, TX