San Jose, California–KLA Tencor Corp. recently filed patent infringement counterclaims against ADE Corp. in U.S. District Court in Delaware. The counterclaims allege that ADE has infringed upon and continues to infringe upon three patents owned by KLA-Tencor. The patents include U.S. Patent No. 5,226,118, entitled “Data Analysis System and Method for Industrial Process Control System,” U.S. Patent No. 5,883,710, entitled “Scanning System for Inspecting Anomalies on Surfaces,” and U.S. Patent No. 6,081,325, entitled “Optical Scanning System for Surface Inspection.”
The suit seeks damages for patent infringement, as well as an injunction against any future infringement activity. In addition, KLA- Tencor has asked the District Court for a declaration that U.S. Patent No. 6,118,525 is invalid and not infringed upon by KLA-Tencor.
ADE had filed suit against KLA-Tencor in October of this year for allegedly infringing that patent.