Mitsubishi Electric to ship MEMS samples

Mitsubishi Electric plans to start shipping samples of a new MEMS acceleration sensor chip set in October.

The company uses a new type of surface micromachining on a thin film layer on the silicon wafer, making production more similar to conventional semiconductor processes, and thus making it smaller and cheaper.

It will package the MEMS sensor with an LSI sensor and signal processor in one unit for about $17.

?Nikkei Microdevices


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