November 6, 2001 — TOKYO — A group of 11 companies is reportedly planning to spend more than $231 million to build three state-of-the-art research and development facilities that will be used to produce next-generation semiconductors.
The consortium includes NEC Corp. and Hitachi, according to a report by the Nihon Keizai Shimbun. The group is expected to establish two facilites in the Tsukuba, Ibaraki Prefecture – one using a cleanroom established by the National Institute of Advanced Industrial Science and Technology, and another at a NEC laboratory. The third will be established in Sugito, Saitama Prefecture.
The consortium plans to use the labs to develop the means to manufacture microchips with a line width of 0.07-0.10 microns, the report said.
Semiconductor Leading Edge Technologies is currently said to be working on the exposure and etching needed for such chip processing.