Therma-Wave to acquire Sensys Instruments

Dec. 19, 2001 – Fremont, CA – Therma-Wave Inc. has signed a definitive agreement to acquire Sensys Instruments Corp.

Upon consummation of the transaction, which is subject to various conditions including approval by Sensys shareholders, Sensys will become a wholly owned subsidiary of Therma-Wave, focusing primarily on the emerging market for integrated metrology.

The transaction will involve the exchange of shares of common stock of Therma-Wave and, under certain circumstances, cash and promissory notes of Therma-Wave. The transaction is expected to close early in 1Q02.

Sensys Instruments Corp., a privately held company based in Santa Clara, CA, was started in 1996 to develop and commercialize integrated metrology systems for the semiconductor industry. The company has introduced integrated metrology systems for CMP and photo resist coater/developer applications.


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