Rudolph Technologies enters defect market; Acquires ISOA

July 23, 2002 – Flanders, NJ – Rudolph Technologies Inc., a provider of process control metrology systems, has entered into a definitive agreement to acquire privately held ISOA, a defect control company based in Richardson, TX.

The acquisition is an all cash transaction valued at approximately $27.5 million.

ISOA is a spin-off from Texas Tech U.’s International Center for Informatics Research (formerly the Institute for Studies of Organizational Automation).

Over the past 16 years, ISOA has licensed its technology for use in the semiconductor industry and recently began transitioning to a semiconductor capital equipment supplier. The company’s core technologies are knowledge based algorithms used in wafer macro defect detection and classification.

Customers in Asia, Europe, and the US are currently using its recently introduced WaferView family of tools.
Following the completion of the transaction, ISOA will continue to maintain its offices in Richardson, TX, and will become the yield metrology group of Rudolph. Additionally, ISOA’s tool manufacturing currently outsourced to Japan, will be moved to Rudolph’s Ledgewood, NJ, facility. ISOA currently has approximately 40 employees.


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