Mykrolis gas purification systems to be used in LED production

September 14–Mykrolis Corporation, a leading supplier of components and subsystems to the semiconductor industry, today announced that it has shipped four Aeronex Infinity Gas Purification Systems to a major epi-wafer manufacturer located in Tainan, Taiwan. The systems–two EGPS12 I Series, an EGPS12 H Series, and an EGPS8 SK Series–will be used to purify process nitrogen, hydrogen, and ammonia used in the production of LED chips and will be installed this month. The Aeronex systems will help the epi-wafer manufacturer reduce production costs and achieve a higher and more consistent production yield.

“As part of Mykrolis’s overall strategy to continue expanding its Asia customer base, this selection of Aeronex Gas Purification Systems is a breakthrough in meeting overall MOCVD bulk purification needs in H2, N2, and NH3,” said Jay Hamidi, director of technology for the gas microcontamination control business at Mykrolis. “We are pleased to be recognized by this customer and look forward to providing them with the most innovative, gas purification technologies available.”

Dual-bed, self-regenerating Aeronex Infinity Gas Purification Systems deliver a continuous supply of pure gas and remove contaminants to sub-ppb (part-per-billion) levels, with some to ppt (part-per-trillion) levels, needed to purge contaminants and protect the process. They are available in several different gas series to generate ultra high purity H2, NH3, and inert gases.


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