June 9, 2006 – BOC Edwards and JV partner BOD Lien Hwa have begun work on the next phase of expansion of the company’s nitrogen production pipeline distribution network in the Hsinchu Science Park in northern Taiwan.
In the new phase, to cost no more than $30 million, BOC will build what it calls its “largest-ever semiconductor grade nitrogen generator,” adding capacity of 35,000 Nm3/hour to current installed capacity of more than 100,000 Nm3/hour, the largest high-purity gas distribution network in Taiwan.
The new phase follows a capacity expansion and startup in February of an ultrahigh purity liquid nitrogen plant in the park. Adding a tenth plant to the system will support continued growth of 300mm fabs in the park.
BOC’s pipeline network in the park, in place since 1988, supplies ultrahigh purity nitrogen to more than 20 advanced wafer fabrication facilities, incorporating more than 20km of underground pipelines, noted Neels Kriek, managing director of materials and services for BOC Edwards.