JANUARY 7, 2009–LEHIGH VALLEY, PA–Air Products and Showa Denko will extend their 10-year production joint venture (Showa Denko Air Products Co. Ltd.) for etch and chamber cleaning products such as tetrafluoromethane (CF₄) and hexafluoroethane (C₂F₆) by building a new production facility to manufacture hexafluoride butadiene (C₄F₆) in Kawasaki, Japan. The new C₄F₆ plant is expected to be completed in the first half of 2009.

CF₄ and C₂F₆ remain reliable and cost-competitive etch and chamber cleaning gases. Additionally, as logic and memory device manufacturing transitions to smaller geometries, higher-aspect-ratio dielectric etching will utilize more C₄F₆ because of its performance properties exhibits within state-of-the-art, high-density plasma etching processes. C₄F₆ typically provides higher selectivity and better etch profiles compared to other dielectric etch gases.

“Air Products is pleased to extend our relationship with Showa Denko for these important cleaning and etch gases,” says Corning Painter, vice president and general manager of electronics for Air Products. “In addition, Showa Denko Air Products recognizes the increased importance of materials like C₄F₆ for critical dimension etch and is excited to be building capacity to meet that demand. This investment, along with our existing patented purification and transfill investments, will help Air Products increase our security of supply and meet anticipated increases in end customer demand.”

Showa Denko Air Products (SDAP) was formed in 1996 to leverage Air Products’ fluorine-handling capabilities and Showa Denko’s technical and operating expertise in large-scale perfluorocarbon production facilities. In 1997, SDAP built a production facility for CF₄ and C₂F₆ in Kawasaki, Japan. Since that time, SDAP has expanded three times to more than double capacity at the plant. Air Products and Showa Denko recently agreed to extend their production joint venture for another five years.

Source: Air Products

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