OEM Group Inc. (Gilbert, Ariz.), which provides new and remanufactured equipment to manufacturers of silicon, MEMS, LED, RFID, power and photovoltaic devices, has added high-quality AlN foundry services performed in its applications lab, beginning immediately.
Included in the recent acquisition of the thin films and PVD product lines from Tegal Corp., the OEM Group foundry services use the SFI Endeavor AT PVD platform to produce piezoelectric AlN films on a variety of 4-6 in. wafers used in SAW, BAW, FBAR and MEMS. OEM Group also participates in customer R&D projects by helping to optimize devices and technology, and developing customized deposition processes.
“Performance of AlN-based electro-acoustic devices such as BAW and FBAR filters, oscillators and resonating sensors is substantially tied to thin-film technology,” said Valeriy Felmetsger, PVD process development manager for OEM Group. “As of today, reactive magnetron sputtering is a method of choice enabling formation of AlN films with a high degree of c-axis texture and thus a strong piezoelectric response.”
Wayne Jeveli, president of the company, noted that foundry services were a logical next step given OEM Group’s infrastructure, equipment and expertise.