Sonoscan’s AW300™ is not limited to inspecting 300mm wafers for internal defects; it can inspect other sizes of wafers and in various carrier configurations. The AW300 was originally designed to automatically inspect 300mm wafers in FOUPs or FOSBs carriers, but due to its “BOLTS compatible” flexibility, smaller wafers can be inspected for defects.
Currently 200mm wafers being handled in SMIFs, Cassettes or FOUPs with 200mm adapter inserts can be inspected. If you use FOUPs with inserts, the AW300 design is ready to go for 200mm wafer inspection. For 200mm SMIF carriers the BOLTS compatible loadports only need to be changed to SMIF loadports. If your 200mm wafers are in cassettes, BOLTS compatible cassette loadports are available, too.
Perhaps you need to inspect even smaller wafers; the cassette loadport configuration can handle 150mm wafers as well. In addition, wafer film frames can be handled by the AW300 with the proper robot end effector.
The AW300 by Sonoscan (www.sonoscan.com) has become quite universal and flexible for handling 150 to 300mm wafers. It can even be configured with two (2) different types of loadports, i.e. a 200mm and 300mm loadport, for users transitioning wafer sizes who want to meet their current and future needs for production wafer inspection.