For the most critical semiconductor gas delivery requirements, HORIBA STEC introduces the D500 Mass Flow Module. Extending the Criterion technology from the highly accurate and reliable D200 series, the D500 provides unparalleled accuracy and repeatability while providing self-diagnostics, high-turn down capability, and line pressure insensitivity.
Developed utilizing the most advanced gas metrology facilities and technologies, the D500 will aid equipment and process engineers with the chamber matching process by using the D500’s internal diagnostics to ensure that the gas delivery system remains accurate and repeatable. Please come by SEMICON West 2013 booth 1819 for a demonstration.
