Q: What is your business segment, product, and approach?
A: We have created a compact and reliable tool which is very capable and affordable in the very competitive R&D market. The tool was developed with the capabilities of the highly respected SLR technology developed by Plasma-Therm, our parent company. The SLR tool is one of the most reliable and capable tools in use by labs, universities and institutions world-wide. The Apex SLR takes advantage of the features of the SLR and is repackaged in a compact form factor using all digital communication and the best-of-breed components available today.
Q: What was your goal with this product?
A: We provide an ICP tool to develop processes and methods for etching compound and mainstream semiconductor materials for potential transfer to mainstream device production.
Q: How is your product or approach different from your competition?
A: The Apex SLR is smaller, more reliable and affordably priced. Leveraging years of proven SLR processing capabilities, the Apex SLR will allow users to continue the legacy of a reliable platform, known process capability and a service and support network that has been recognized for 15 years as the “Best of the Best”.
Q: How is your product or approach better than your competition?
A: Besides the well-established process capabilities of the SLR technology, the Apex SLR was developed to accommodate specific needs for the R&D market. These would be: High reliability, small footprint, ease of use, repeatable processing and ease of serviceability; all at a very competitive and affordable cost.
Q: What changes or shifts (business / technical) do you see coming in this product segment?
A: The R&D and Failure/Yield analysis markets require a tool that is easy to use, is available for processing when needed. Tool reliability, flexibility, capability and dependability will drive the market for years to come.
Q: How will you help customers address those shifts?
A: We have addressed these issues with forward thinking design and capabilities already designed into the tool. If there is a failure, customers do not want to spend time taking off covers and weeding through a jungle of wires and components to get the tool operational. With best-of-breed components and packaging that makes sense with easy access, the Apex SLR is already designed and built with today’s needs and tomorrow’s possibilities.