HORIBA’s PD series has attained a solid reputation in semiconductor fabrication for its stability and high uptime over long periods. Inheriting a transfer system that has proven to provide stable, high performance and superior throughput, the PR-PD2HR now offers the most sensitive detection in the standard series with exclusive signal processing that can detect particles as small as 0.35 µm.
Compatible with any stepper case, the PR-PD2HR features a multi-stage sorter that can handle up to 10 cassettes and supports a number of communication protocols. True to its colors as a member of the PD Series it boasts high capability over a broad range of general reticle and mask particle detection tasks as well as being able to evaluate glass or pellicle surfaces with high throughput. The PR-PD2HR will prove its worth by contributing to yield improvements in any semiconductor fabrication or next generation mask production facility.
