CEA-Leti, the applied research center for microelectronics and for information and healthcare technologies located at the MINATEC consortium in Grenoble, France, has announced that the IMAGINE Maskless Lithography Workshop will be held September 6, 2011 at the Keio Plaza Hotel in Tokyo, Japan.
The IMAGINE program, launched in July 2009, began as a collaboration between CEA-Leti and MAPPER Lithography B.V. to investigate maskless lithography techniques that would be needed to replace today’s optical lithography in semiconductor manufacturing. Launched with the delivery of MAPPER’s Massively Parallel Electron Beam Platform to Leti at that time, the program was developed to provide the world’s major chip manufacturers with opportunities to assess leading-edge maskless lithography technology in a manufacturing environment. IMAGINE also has the goal of developing and qualifying the necessary infrastructure to enable high-volume production use of maskless lithography technology.
The Workshop agenda includes a technical update on the program’s main achievements, updates on MAPPER’s technology roadmap, and discussions on lithography options for the 22nm and future manufacturing nodes.
The IMAGINE program partners now include Mentor Graphics, SOKUDO, STMicroelectronics, TOK, and TSMC, all of whom have committed resources to the collaborative development of multiple e-beam advanced lithography technology.
Photo: Info-EconomiqueSpeaking at SEMICON West in July 2011, Leti CEO Laurent Malier noted the significant progress made at Leti during the last year. “Leti’s focus on semiconductor technologies, including design, chemistry, and characterization,” said Malier, “will have impacts on applications in many parts of the global economy.” The core Leti research work is on semiconductor manufacturing technologies, noted Malier, but the application of these leading-edge technologies will advance health care, energy management, and many other fields. Click here to view M. Malier’s SEMICON West presentation.
To register for the workshop, contact Thomas Iljic: (+81) 03 57 98 63 39, or at [email protected].
For more information on Leti, please visit www.leti.fr