Atmospheric process chamber pressure controller

Atmospheric process chamber pressure controller

The SENTRY 1510 from Progressive Technologies controls the pressure in sealed atmospheric process chambers, such as vertical furnaces or rapid thermal processors.

The closed-loop pressure controller uses the “floating piston” concept currently in use to improve process repeatability. By isolating the process from house exhaust fluctuations the SENTRY 1510 controls contamination, improving film integrity.

In processes utilizing HC1, potentially hazardous materials are confined to the isolated chamber and the house exhaust, minimizing risk to equipment and personnel.

Progressive Technologies

Andover, MA

(508) 685-6080

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