Metrology

METROLOGY ARTICLES



Process Watch: Automotive defect sensitivity requirements

02/07/2020  Semiconductors continue to grow in importance in the automotive supply chain, requiring IC manufacturers to adapt their processes to produce chips that meet automotive quality standards.

Overlay performance of through silicon via last lithography for 3D packaging

02/05/2020  A lithographic method for TSV alignment to embedded targets was evaluated using in-line stepper self metrology, with TIS correction.

97 IC wafer fabs closed or repurposed during past 10 years

02/28/2019  90% of closures were ?200mm wafer fabs; greatest number of closures in Japan.

ON Semiconductor names 2018 Distribution Partner Award winners

02/27/2019  ON Semiconductor today announced its top distribution partners for 2018.

Nova and GLOBALFOUNDRIES jointly awarded the 'Best Metrology Paper' at SPIE Advanced Lithography conference

02/27/2019  Demonstrating adaptive metrology capabilities using machine learning engines.

IBM elects Michelle J. Howard to its Board of Directors

02/27/2019  The IBM board of directors today elected Admiral Michelle J. Howard to the board, effective March 1, 2019.

French start-up moves to the edge with battery-operated devices

02/26/2019  The SEMI Europe Industry Strategy Symposium (ISS Europe) returns in Milan, Italy, this year from 31st March to 2nd April, 2019 to explore new opportunities and challenges in the digital economy.

SEMI launches initiative to build talent pipeline critical to global electronics industry growth

02/25/2019  SEMI today announced SEMI Works, a comprehensive program to attract, develop and retain the talent critical to the worldwide electronics industry's continued innovation and growth.

North American semiconductor equipment industry posts January 2019 billings

02/22/2019  January billings of North American equipment manufacturers declined 10 percent when compared to the prior month.

Advances in logic IC process technology move forward

02/22/2019  Despite increasing development costs, IC manufacturers continue to make great strides.

pSemi announces Sumit Tomar will be transitioning to CEO

02/20/2019  pSemi Corporation today announced that its parent company and executive leadership has approved the recommendation of Chairman and Chief Executive Officer Jim Cable for an evolution of the company's senior leadership structure.

GLOBALFOUNDRIES crosses billion-dollar design win threshold with 8SW RF SOI technology

02/20/2019  Mobile market continues to favor RF SOI, with 8SW proving to be the industry's leading platform for power-optimized chips.

A ride on the business cycle

02/19/2019  World electronic industry growth moderated (or contracted) in many sectors in late 2018.

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Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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