Gas scrubbing system

Gas scrubbing system

The Model D150 Dual System Gas Reactor Column (GRC) with automatic switchover is introduced by Edwards High Vacuum International.

Designed specifically for semiconductor production facilities, the Dual GRC is a two-cartridge system that scrubs gas continuously, without production interruption. During automatic switchover from the spent cartridge to the second cartridge, an automatic leak check occurs before the new cartridge qualifies as a proper installation. The expended cartridge may be changed at room temperature while the other cartridge is processing exhaust gas.

The model D150 Dual GRC is a hot bed reactor that removes hazardous gases from the exhausts of vacuum pumps. The gases are chemically reacted to completion and converted into inert, stable inorganic salts.

The Dual GRC has a programmable logic controller (PLC) with safety interlocks.

Unit operation is controlled by PLC and operation parameters may be adjusted to meet customer requirements.

Edwards High Vacuum International

Wilmington, MA

(508) 658-5410


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