A series of perfluoroelastomer compounds has been developed by Greene, Tweed & Co. to meet semiconductor manufacturing process environments. Seals of Chemraz AquaPro have been developed for critical sealing areas in wet chemistry processing and photolithography. Seals of Chemraz PlasmaPro have been developed for critical sealing applications in etch, CVD and diffusion processes.
The seals of Chemraz AquaPro are made of perfluoroelastomer compounds with the integrity to demonstrate lower than 5 ppb extractables of metallic ions in DI and ozonated water systems. Seals of Chemraz PlasmaPro improve reliability and reduce downtime by minimizing particle contamination.
Greene, Tweed & Co., Kulpsville, PA (215) 256-9521