PVD systems

PVD systems

ECLIPSE Mark II and ECLIPSE-Star PVD systems, from Materials Research Corporation (MRC), can now be utilized under Class 1 cleanroom conditions, without the need for a Class 1 cleanroom.

A new Standard Mechanical Interface (SMIF) Interface System from Asyst Technologies provides a controlled, Class 1 mini-environment and automated I/O ports right to the ECLIPSE systems` wafer handling robot, which reduces particulate and gas contamination of the wafer surface while eliminating additional air-handling, robotics, special-clothing and other costs typically generated by the construction, use and maintenance of a complete Class 1 cleanroom.

The new SMIF system can be purchased for the ECLIPSE systems from Asyst Technologies for wafer sizes up to 200 mm.

An electrical interface package is available from MRC to interlock the SMIF-Arms and provide load/unload signals for automated operation. This automated interface provides a mechanical and software control feature that enables the ECLIPSE systems to be operated in semi-automatic mode from the SMIF-Arms as a SMIF-Pod is loaded in a cleanroom.

Materials Research Corporation

Orangeburg, NY

(914) 359-4200


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