General Air Corp. has designed and developed a precise controlled-environment enclosure (minienvironment) for highly sensitive photo-optical and mechanical equipment in a production or research and development environment. It is currently being used for photomasking operations in the semiconductor industry and other applications where close environmental control is required. General Air`s environmental chamber is Class 10 or better; has temperature controls of +/- 0.05 °C at 6 in. from filter face; a temperature range of 19.5 to 25 °C at an ambient of 15 to 28 °C at 60 percent RH. maximum; a temperature gradient of +/- 0.2 °C and air flow of 90 +/- 20 fpm. across the filter face. Makeup air is 0-10 percent of circulated air.
General Air Corp., Chatsworth, CA (818) 718-8955