Residual gas analyzers

Residual gas analyzers

The NGS Division of MKS Instruments, Inc. makes the PPT Series of Residual Gas Analyzers (RGAs) for use in semiconductor manufacturing. Designed for use at pressures below 1 &#165 10-4 Torr, the standalone NGS RGA`s perform process monitoring, leak detection, contamination detection, as well as background analysis of a variety of semiconductor processes.

With mass ranges to 300 amu, Faraday cup, electron multiplier detectors, and easy-to-use, prompt-driven software, the RGAs are compact and cost effective, consisting of a single electronics control unit mounted directly on a quadrupole sensor flange. The control unit can be interfaced directly with any IBM or compatible PC to enable local display and data recording.

MKS Instruments, Inc.

Andover, MA

(800) 227-8766


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