Residual gas analyzers
The NGS Division of MKS Instruments, Inc. makes the PPT Series of Residual Gas Analyzers (RGAs) for use in semiconductor manufacturing. Designed for use at pressures below 1 ¥ 10-4 Torr, the standalone NGS RGA`s perform process monitoring, leak detection, contamination detection, as well as background analysis of a variety of semiconductor processes.
With mass ranges to 300 amu, Faraday cup, electron multiplier detectors, and easy-to-use, prompt-driven software, the RGAs are compact and cost effective, consisting of a single electronics control unit mounted directly on a quadrupole sensor flange. The control unit can be interfaced directly with any IBM or compatible PC to enable local display and data recording.
MKS Instruments, Inc.