Interlab is introducing its newest line of etch systems for flat panel displays. Fully automated, these systems can accommodate substrates up to 360 465 mm in size. All process chemistries including BOE, Olift-off;O and piranha clean are maintained via filtered recirculation. The rinse scheme incorporates in-line heating and DI water regeneration. Interlab?s patented laminar flow, HEPA-filtered dryer completes the process.