Gas inlet valve

Gas inlet valve

VAT, Inc.?s Series 69 Variable Leak Valves feature a manually adjusted, hydraulically actuated mechanism that compresses a stainless steel membrane against a fixed surface, permitting vacuum-tight sealing from UHV to 10 BAR. Virtually unaffected by condensation and dirt, the Series 69 valve provides accurate, repeatable gas flow settings by micrometer adjustment.

The Series 69 offers adjustable gas flows from 6 10-8 SCCM to 36,000 SCCM at 10 BAR. Bakeable to 120!C, they have a stainless steel body with selective gold plating, an Inconel sealing surface and no internal elastomers. A heater jacket is optional.

VAT Inc.

Woburn, MA

(617) 935-1446


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