Software for in situ particle sensors

Software for in situ particle sensors

Pacific Scientific?s High Yield Technology (HYT) Division announced it has developed Particle Vision II, a Windows-based software program that collects, displays and analyzes real-time data from all HYT in situ particle sensors.

The software, an upgrade from the original DOS-only Particle Vision program, offers enhanced data collection capabilities for particle monitoring in semiconductor production environments.

The upgraded Machine State Trigger feature lets particle data collection be synchronized with up to 256 specific states of the process equipment. Each process step can be tracked independently, and up to 15 sensors can be monitored simultaneously, of critical importance when monitoring multiple-step processes. Another feature offered by particle Vision II is its ability to dynamically tune each sensor for each process step. Parameters are downloaded to the controller when the machine trigger pattern is active, and tuning can be defined for up to eight machine trigger patterns per sensor.

Pacific Scientific

High Yield Technology Division

Sunnyvale, CA

(408) 730-4585


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