The Tencor P-30 is the newest semiconductor high-performance surface profiler with integrated SMIF technology from Tencor Instruments. The P-30 provides a better than Class 1 minienvironment, which lets it support state-of-the-art process technology within a less stringent cleanroom environment.
In addition, the profiler features a built-in vibration isolation table for high-precision measurements, and advanced pattern recognition to reduce alignment and measurement errors. Together with Tencor`s automated substrate handler, the pattern recognition feature lets a full cassette of wafers be measured without operator intervention. It can be configured with Tencor`s optional SECS II software for bi-directional communication between the P-30 and the fab`s host computer.
The profiler does feature Tencor`s new MicroHead II low-force measurement head, which lets measurements be made on product wafers rather than testing or monitoring the substrate. The MicroHead II accurately measures highly sensitive films, such as photoresist and aluminum because its stylus forces can be as low as 0.05 mg, according to Tencor.
The P-30 has a Microsoft Windows-based graphical user interface. Up to 40 key surface parameters can be selected to analyze step height, roughness, waviness, and radius of curvature.
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