Semifab Inc.?s full-enclosure environmental chambers provide an environment control solution where full tool containment and/or isolation is required. The chambers can be used for single or cluster tools that demand uniform contamination and/or environmental control over the entire surface.
The tool-specific environment includes airflow configurations that adapt to tool design and usage parameters within the minienvironment chamber at point of process. Operator access ports and maintenance panel placements, designed according to the tool?s configuration, maximize ergonomics and maintainability. Safety, lighting, control interlocks and communications are systematically integrated within the tool and the minienvironment. Temperature and/or relative humidity control is also available, using RAM Series Process Air Control modules designed to deliver a minimum of ?0.1!C temperature and ?1.0 percent RH control.