Wafer-handling robot

Wafer-handling robot

Equipe Technologies introduces the VAC 200 series of MESC-compatible vacuum chamber wafer-handling robots and its companion product, the VXR 075 vacuum cassette indexer. These products combine Class 1 cleanliness and precise robotic mechanisms with high level control for reliable vacuum wafer-handling. The VAC 200 and VXR 075 vacuum system may be operated by the ESC 200 Equipe smart controller, which uses macros to create customized high level commands.

Equipe Technologies

Sunnyvale, CA

(408) 522-0350


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