Scanning Probe Microscope

Scanning Probe Microscope

TopoMetrix Corp. announces the new Voyager Production Scanning Probe Microscope (SPM) system with robotic cassette-to-cassette automated sample loading, designed to meet the production needs of semiconductor manufacturers. It combines advanced data management software with a robotic wafer handler and alignment system for convenient loading of wafers and simple operation. The Voyager Production SMP combines a custom sound isolation chamber and vibration isolation with TrueMetrix closed-loop scan linearization for accurate and reproducible measurements in a cleanroom environment. Significant features include robotized vacuum-wand handling of wafers and masks up to 8 in. and a software-controlled optical microscope with up to 2,800&#165 magnification.

TopoMetrix Corp., Santa Clara, CA (408) 982-9700

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