Vacuum inlet trap
MV Products offers an upgraded cooling option for its high capacity vacuum inlet trap that enhances the condensation of ammonium chloride from the vapor stream of reactive manufacturing processes. The stainless steel MV Multi-Trap Cooling Coil Option expedites the first stage condensation of ammonium chloride in LPVCD, TEOS, Nitride, LTO, Plasma, and other reactive processes by lowering the temperature of the effluent gas stream. Featuring three stages, the high capacity, high conductance vacuum inlet trap protects pumps and systems from corrosive chemicals and abrasive particulates. The MV Multi-Trap provides a knock-down first stage and two parallel banks of up to six filter elements each and comes with a new clamping system for easy installation. Filter elements are available in copper or stainless steel gauze, molecular sieve, activated charcoal, activated alumina, Sodasorb and pleated polypropylene.
MV Products, A Division of Mass-Vac Inc., No. Billerica, MA (508)
677-2393