Continuous real-time monitors

Continuous real-time monitors

Environmental Technologies Group, Inc. has developed two new products that allow monitoring at low ppb and ppt levels. The ProSentry-IMS (Ion Mobility Spectrometry) for ammonia and the AirSentry-IMS for n-methyl pyrrolidone are designed to monitor each specific gas without interference from each other or any other compound used in the semiconductor industry, says the company. IMS is the only method of detection that can monitor as low as 500 ppt and is unaffected by temperature and humidity, according to the company.

These units are available in standalone NEMA 4&#165 enclosures and can be mounted at the sampling point. The analyzers are used to monitor in and around the tool, as well as to check filter efficiency.

Environmental Technologies Group, Inc.

Baltimore, MD

(401) 321-5200


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