Point-of-use purifier and filter for inert gases
Aeronex`s GateKeeper model 35K point-of-use inert gas purifier and filter reduces both particle and molecular contamination in inert gases for semiconductor applications. The 35K is Aeronex`s first combination purifier and filter. The 35K can handle flow rates up to 1 slm and can filter/purify 35,000 liters of 99.999 percent pure gas (it can purify larger amounts of higher purity gas). Its filter media is 316L SST and has been tested to verify particle retention of 99.9999999 percent of all particles 0.01 µm and larger. The purifier media is all metallic and will not release hydrocarbons. Patented by BOC Gases, the media reduces contaminants, such as moisture, oxygen, methane, CO2, CO and H2–in the inert gas stream to below 1 ppb. The 35K was designed to be a drop-in replacement for existing filters with a footprint of 3.31 in., a diameter of 1.5 in., and 1.25-in. VCR-compatible outlet fittings.
Aeronex, Inc. 6975 Flanders Dr., San Diego, CA (800) 511-9761