Wafer surface particle measuring system
The Wafer Surface Particle Measuring System (WM-3) from Topcon Technologies, Inc. detects particles on a wafer surface and transfers data to a host computer for expanded analysis. The WM-3`s mean-time-between failures exceeds 10,000 hours and the product offers particle size classification up to 60 precalibrated size settings with numerical and defect map display. It uses the scattered laser light detection method and has a footprint of 3 ft2. Key applications include: process, equipment and cleanroom monitoring, engineering analysis and yield improvement.
Topcon Technologies, Paramus, NJ (800) 538-6850