Gas mass flow controller

Gas mass flow controller

Precision Flow Devices is adding a new mass flow controller to its line of 500 Series products. The high-flow TEOS gas mass flow controller is designed for ultra low vapor pressure applications. The product will retrofit to allow for increased flow rates in existing systems. Heaters are imbedded in the body of the MFC to produce even heating throughout, with temperature stabilization at 95&#176C within 15 minutes of startup. The new product has a large bore sensor and a low-drop designed bypass which provides for flows of up to 1,000 sccm of vapor pressure gas flow. All metal configurations are available.

Precision Flow Devices

San Jose, CA

(408) 453-9228


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