Microwave plasma reactor
Cambridge Fluid Systems has introduced the MRC100 and MRC200 microwave plasma reactors for resist removal (at up to 1 micron per minute), cleaning of ceramics and glassware, and surface treatment of plastics. The main difference between the MRC100 and the MRC200 and conventional plasma ashers is the microwave plasma excitation frequency allows for repeatable processing runs and low thermal loading.
The reactors are available in two sizes: 100 and 190 mm diameters for the internal chambers. Power levels can be configured for each application.
Cambridge Fluid Systems