Microwave plasma reactor

Microwave plasma reactor

Cambridge Fluid Systems has introduced the MRC100 and MRC200 microwave plasma reactors for resist removal (at up to 1 micron per minute), cleaning of ceramics and glassware, and surface treatment of plastics. The main difference between the MRC100 and the MRC200 and conventional plasma ashers is the microwave plasma excitation frequency allows for repeatable processing runs and low thermal loading.

The reactors are available in two sizes: 100 and 190 mm diameters for the internal chambers. Power levels can be configured for each application.

Cambridge Fluid Systems

Cambridge, England

(44) 1954-782631


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.