New system automates 150 mm and 200 mm wafer cassettes handling
Minneapolis, MN–FSI International, Inc.`s new, Class 1 automated Material Handling System, designed for its Mercury Surface Conditioning System, is a customizable workcell package that expands and improves production capabilities by automating the handling of 6-in. (150 mm) and 8-in. (200 mm) wafer cassettes. The new MHS system transfers wafer and wafer cassettes to and from the Mercury process chamber and helps to ensure maximum process tool utilization via optimized throughput, reduced external contamination and minimized human interaction. The MHS input/output module accepts standard cassettes or SMIF pods. The system then automatically checks wafer count and determines if wafers are balanced. If the cassettes are constructed of polypropylene, the system transfers the wafers to a Teflon cassette. Make-up wafers and cassettes can be added as needed to balance the process-chamber load. When the process is complete, the system transfers the wafers back to their original cassette and retrieves any added make-up wafers.