Worlds first “true direct drive” vacuum process tool robot introduced

World`s first “true direct drive” vacuum process tool robot introduced

San Jose, CA–A new company, Smart Machines, Inc., has brought together experts in the fields of mechanical, electronic and software engineering to offer semiconductor manufacturers a new robotics system the company says will increase reliability, throughput, cleanliness and accuracy in current and next-generation semiconductor process tools.

Smart`s first product offerings are vacuum-compatible robotic systems for handling 200 mm and 300 mm wafers. Designated the SVR200 and SVR300, they are designed to meet Sematech`s new requirements of 10 million Mean Cycles Between Failures (MCBF), with a high speed wafer exchange of two or more times faster than conventional timing belt or gear-driven robots. Based on a patent-pending direct-drive architecture, the SVR Series has the first “true” directly-coupled drive system and uses fewer parts subject to wear than any other commercial wafer handling robot, the company claims.


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