Automated wet station

Automated wet station

The GAMA-2 automated wet station, from SubMicron Systems (SMS), can achieve throughput up to 500 wph with reduced cost per wafer. The GAMA-2 automated acid/solvent wet station can transfer wafers in double lots and with larger wafer lot sizes GAMA-2 can process up to 400-500 wph, depending upon process application. Up to 4-ply cassettes can be loaded at one time into a single 100 wafer cassetteless carrier. Continuous, fully automated loading/unloading of carriers and pods with built-in storage for WIP is featured. Using SMS`s DIO3 Process in conjunction with the GAMA-2`s post-ash resist strip processes, 500 wph throughput can be achieved, according to SMS.

SubMicron Systems Corp., Allentown, PA

(610) 391-9200


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