SubMicron Systems expands lab for new 300-mm wet station
Allentown, PA — SubMicron Systems, (SMS) Inc. is putting the finishing touches on its expanded applications laboratory, which will contain one of the semiconductor industry`s first 300-mm automated wet stations, the company claims. SMS is investing over $750,000 in the applications laboratory and another $2 million for equipment, including 300 mm tools. The Class 1 applications laboratory was extended from 3,000 ft2 to 4,000 ft2 to house all three models of the GAMA family of automated wet stations, including an improved version of the GAMA-1 wet station, the GAMA-2 wet station with a new non-toxic process for photoresist stripping, and the soon-to-be-released GAMA-3 for 300 mm manufacturing.