Program to advance reflective optics

Program to advance reflective optics

San Jose, CA

Silicon Valley Group`s lithography subsidiary is collaborating with the National Aeronautics and Space Administration`s (NASA) Goddard Space Flight Center, Sematech and Tinsley Laboratories as part of a new program that will leverage government and semiconductor industry resources to advance reflective optics manufacturing for the semiconductor industry. The parties involved in the effort, which operates as the High Precision Optics Joint Sponsored Research Agreement, plan to develop the most advanced microlithography machines created to date. – KS

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