DUV manufacturers new site has Class 1,000 cleanroom

DUV manufacturer`s new site has Class 1,000 cleanroom

Ridgefield, CT

Silicon Valley Group (San Jose, CA) is up and running at its new manufacturing facility in Ridgefield, CT. The facility, which includes 6,000 sq. ft. of Class 1,000 cleanroom space, will boost capacity of Silicon Valley Group`s production of its Microscan series of deep ultraviolet (DUV) lithography systems. The facility will enable the company to increase its manufacturing capacity to five times the volume it produced in 1996. — KS

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