HVAC system comes in multiple configurations
Intelligent Enclosures Corp.offers a self-contained precision cleanroom HVAC system called Air-Guard 2000 that provides temperature and humidity control. It uses a microprocessor controller to combine Proportional/ Integral/ Differential (PID) with a built-in fuzzy logic function that enables the controller to imitate the actions of operators. The system includes control stabilities for temperature and humidity of up to ± 0.1 degrees Fahrenheit and ± 1 percent relative humidity. Air-Guard 2000 users can choose either single-path or a re-circulating type configuration with return-ductwork. Remote computer-access and continuous data-logging and monitoring are available via RS-422 communication lines. Up to 8 HVAC units can be connected to each PC COM port. The HVAC comes in 2- to 20-ton capacities, and its height is low enough to clear standard cleanroom doors.
The company also announced the Total-control Micro-Pro 100 for cleanrooms, an advanced chilled-water HVAC system designed for use with steppers, CMP, photomask, spincoat, and lithography processes. It fits in a 2-feet by 4-feet ceiling grid and weighs less than 300 pounds.
Intelligent Enclosures Corp., Norcross, GA
(770) 564-5640