Laser ADC module
Tencor Instruments has introduced the Tencor Laser AC module, a new option for its line of CRS laser confocal review stations. Currently a provider of white light ADC technology, the company offers the first laser confocal ADC technology successfully addressing high level, back-end processes such as after-metal etch and post-chemical-mechanical planarization (CMP). The new Laser ADC software package fully automates the process of defect redetection and classification on second-level metal and beyond, eliminating operator-generated classification errors. In addition, it can accept defect file formats from all major inspection systems, providing consistent classification results independently of inspection tools. According to the company, the Laser ADC greatly increases the ability to redetect and classify defects on difficult back-end process levels, ensuring faster and more accurate defect sourcing for faster identification of process excursions. Its unlimited depth of focus, based on a composite of multiple confocal slices, makes it the only ADC technique that can be successfully applied to later process levels.
Tencor Instruments, Mountain View, CA