Air Products doubles WF6 capacity

Lehigh Valley, PA

Air Products and Chemicals Inc. expects to double the tungsten hexafluoride (WF6 ) production capacity of its electronic specialty gas manufacturing facility. By third quarter of this year, production will have increased to approximately 140,000 pounds per year to meet increased demand for the product by the semiconductor industry. Demand for the gas, driven by communication and consumer product applications, is expected to continue growing at double-digit rates, the company claims. WF6 is widely used as a metalization source for the formation of tungsten plug interconnects between multiple layers in the devices. The company maintains the purity of its WF6 by manufacturing, purifying and packaging the gas in non-reactive nickel vessels and cylinders, which prevents metallic impurities from leaching into the product. To further ensure the purity of WF6, Air Products has enhanced its capabilities for analyzing the gas with the January startup of a new state-of-the-art trace metals laboratory. — SES