AG Associates recently introduced improved versions of its Heatpulse 8800 and 8108 RPT systems. The new Heatpulse 8800i and 8108i feature an integrated standard mechanical interface (SMIF) minienvironment that creates a better-than-Class 1 environment with a lower increase to the systems` footprint.
The systems feature two integrated SMIF-Indexers. By combining the RTP and SMIF-Enclosure minienvironment into one system the footprint is reduced and overall fab cleanliness is increased.
AG Associates, San Jose, CA