Gas phase filter bulletin
Hoechst Celanese Corp./Filtration Group`s market alliance has put together a technical bulletin on AQF 853 gas phase filters, which are used to remove boron compounds in environments where silicon wafers and microelectronics are made. Boron compounds, which can pass freely through high-efficiency particulate filters, form naturally during the microelectronics manufacturing process. They then contribute to the formation of performance-altering oxides on silicon surfaces. The AQF 853 filters last hundreds of thousands of hours for boron, depending on the desired degree of removal.
Hoechst Celanese Corp./Filtration Group,, Joliet, IL